which are to be installed in or connected to the target chamber vacuum need to meet standards for 1E-6 mbar. This e.g. includes the use of vacuum compatible lubricants, venting of internal cavities (typically
deposition in the target material is from a few kJ/g to ~ 50 kJ/g. This correspond to temperatures of 1-10 eV and pressures in the multi-kbar to sub-Mbar range incuced in a solid density sample with mm²-size