Max. Operating temperature in vacuum: 1700 ° C
Max. Operating temperature for inert gas operation: 1200 ° C
Component diameter 380mm, height 600mm
Ultimate vacuum in the empty, clean and cold oven: 1x10-6 mbar
Helium leak detectors: Leybold Phoenix L500i, Leybold Phoenix L300i
Precision balance: Mettler TOLEDO max.1.6kg
Ultrasonic cleaning system: Elma Xtra pro 550, basket size (WxDxH) 244x424x200 [mm]; Maximum 15kg (not for UHV applications, cleaning does not comply with Technical Guideline 6.1 and ff.)
Vacuum furnace up to max 250 ° C e.g. for potting
Articulated measuring arm: FARO Edge, Laser Line Probe
High-performance height measuring device: Mitutoyo QM-Height 600
Convection drying cabinet
Precision saw: For cutting ceramics
Surface roughness gauges
Various measuring equipment such as outside micrometers and inside micrometers